Abstract:This paper reports a novel capacitive sensing method, enabling accurate and self-calibrated measurements for both the amplitude and phase information in sinusoidal motion. The approach constructively utilizes the inherent nonlinearity of a triangular-electrode based (TEB) variable-area sense capacitor. In the case of TEB detection signal, two harmonics exist and each carries information about the motional amplitude and phase. The TEB method robustly extracts the motional amplitude from the ratio of two sideband amplitudes and extracts the motional phase from the subtraction of two sideband phases. This technique is especially valuable for capacitive detection of periodic motion in MEMS resonant devices, such as the resonant accelerometer and Coriolis vibratory gyroscope. The paper presents detailed theoretical analysis and proposes a real-time measurement algorithm implemented in an FPGA device. Experimental results manifest that, compared with the traditional linear method, the sensitivity of the measured amplitude and phase to system parameter variations is highly suppressed up to 95%. Furthermore, an oscillation control system with TEB capacitive detection is introduced for micro-machined vibratory gyroscopes. First measurement results show the amplitude variance of the drive displacement is 120 ppm in an hour while the phase variance is 80 ppm. Allan variance analysis indicates a bias instability of 6.5 degrees/h for the gyroscope output. (C) 2016 Elsevier B.V. All rights reserved.

A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

A Robust Triangular-Electrode Based Capacitive Detection Method For Mems Gyroscopes

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

A Novel Triangular-Electrode Based Capacitive Sensing Method for MEMS Resonant Devices

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Design and Test of MEMS Gyroscope Control System Based on LMSD

Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope

A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

Design and optimization of a resonant output frequency gyroscope for robust sensitivity and bandwidth performance

Design and implementation of a fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope for robustness improvement

A sub 0.8 degree per hour mode-matching MEMS vibratory gyroscope with closed loop control for the sense mode

Design and dynamic analysis of a highly sensitive MEMS gyroscope based on mode localization.

A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization

MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control

Force Rebalance Controller Synthesis for A Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications

An Automatic Real-Time Mode-Matching MEMS Gyroscope with Fuzzy and Neural Network Control