MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Yi-yu LIN,Xu-dong ZHENG,Hai-bin WU,Zhi-peng MA,Zhong-he JIN

DOI: https://doi.org/10.3785/j.issn.1008-973X.2019.09.019

2019-01-01

Abstract:A novel drive-mode control scheme for MEMS gyroscopes was presented, where the gyroscopes were parametrically excited with constant resonant frequency. The proposed control scheme enabled a constant resonant frequency excitation with parametric amplification in the drive mode via triangular parallel capacitors, to keep the resonant frequency and quality factor constant against environmental fluctuations, and to improve the gyroscope temperature performance. First, frequency tuning and parametric excitation by means of triangular capacitors were introduced. Then, a new control scheme based on parametric excitation at constant frequency was proposed and implemented. The simulation results indicate that the resonant frequency is tuned to be constant and the dive-mode vibration amplitude is controlled to be stable. Finally, the experimental results indicate that the bias instability of gyroscope was 1.69°/h, which was better than that of the traditional scheme, and the temperature drift of zero-rate output during temperature cooling down was reduced to half compared to the traditional control scheme.