A New Self-Oscillation Loop for MEMS Vibratory Gyroscopes

Zhanfei Wang,Zhihong Li,Wengao Lu

DOI: https://doi.org/10.1109/icasic.2007.4415812

2007-01-01

Abstract:In this paper we analyze self-oscillation loop for MEMS vibratory gyroscopes, present analytical equations for system design, and propose a new self-oscillation loop to improve stability of the drive control system and the recovery speed of oscillation amplitude after a shock.

What problem does this paper attempt to address?

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

QIU Yi-wen,WU Chang-ju,WANG Hao,JIN Zhong-he,WANG Yue-lin

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.08.015

2008-01-01

Abstract:This paper presents a digital AGC of high control-precision,which is applied in the driven-loop of vibrating MEMS gyroscope.The vibrating amplitude stability of the mass in driven mode affects the precision and stability of the angle-velocity detection in the vibrating MEMS gyroscope.A new digital AGC algorithm is proposed in order to improve the stability of driving mode amplitude,and examined in the end.Its controlling precision is improved much higher than the one before and performances effectively in stability and precision of the driving loop circuit.
Constant-frequency Oscillation Control for Vibratory Micro-Machined Gyroscopes

Huijie Zhu,Zhonghe Jin,Shichang Hu,Yidong Liu

DOI: https://doi.org/10.1016/j.sna.2013.01.023

IF: 4.291

2013-01-01

Sensors and Actuators A Physical

Abstract:This paper proposes a new oscillation control algorithm for vibratory micro-machined gyroscope system. The control algorithm tunes the resonant frequency of the gyroscope to the specified resonant frequency and maintains the specified amplitude of oscillation by altering the gyroscope dynamics. Feedback control is designed to achieve frequency tuning in the presence of time-delay. The stability of the control system is analyzed using the averaging method. Based on the real system, simulation models were set up to evaluate the control algorithm. Further, the algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a capacitive vibrational gyroscope operating at atmospheric pressure. First measurement results of the novel digital prototype show the phase variance of the detected signal of drive axis is 13ppm in an hour while the amplitude variance is 22ppm. A bias instability value of 6°/h is achieved using this new oscillation control loop.
Theoretical Analysis and Numerical Simulation of Closed-Loop Self-Oscillation System for MEMS Vibratory Gyroscopes

WANG Zhan-fei,LU Wen-gao,LI Feng,LI Zhi-hong

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.08.009

2008-01-01

Abstract:We analyze self-oscillation system with AGC(automatic gain control)for MEMS vibratory gyroscopes using averaging and phase-plane techniques,and present analytical equations for system design.Numerical simulations are implemented,and the simulation results show a good agreement with the analytical results.In our self-Oscillation drive system,the stable error of the oscillation amplitude is eliminated by the PI controller.The analytical equations can be used to direct the design of the closed-loop drive system in hardware.
One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

Wei Ma,Siqi Liu,Yiyu Lin,Yidong Liu,Zhonghe Jin

DOI: https://doi.org/10.1109/3m-nano.2016.7824917

2016-01-01

Abstract:This paper explores the influence of the phase delay resulting from the signal processing circuitry on the IQ coupling characteristics in MEMS vibratory gyroscopes. In the conventional method, the phase delay appears as a phase error in the phase-locked loop (PLL) of the drive-mode oscillation control. A detailed theoretical analysis derives an analytical equation of the IQ coupling about the phase error. Then, a one-time frequency sweep (OTFS) procedure, which acts as an in-situation network analyzer, is proposed to compensate for the phase error by automatically modifying the reference value of the PLL control. Further, the OTFS method is tested using a field-programmable gate array (FPGA) based digital platform on a vibratory micro-machined gyroscope. Experimental results demonstrate that the OTFS method effectively eliminates the unwanted IQ coupling, and the tested gyroscope exhibits a bias instability of 0.75 °hr and an angle random walk (ARW) of 0.06 °/hr at atmosphere.
Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Xudong Zheng,Xuetong Wang,Yaojie Shen,Chenhao Xia,Wenyuan Tong,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1088/1361-6439/acbfc6

2023-01-01

Journal of Micromechanics and Microengineering

Abstract:We report for the first time an implementable method to identify and suppress the driving force misalignment angle for a MEMS gyroscope working either in amplitude modulated (AM) or Lissajous frequency modulated (LFM) mode using parametric excitation. By introducing driving force misalignment angle into gyroscope dynamic equations, we illustrate that gyroscope angular rate output is affected by driving force misalignment angle and cross-axis damping jointly. We propose parametric excitation as a way to both identify and calculate the driving force misalignment angle. The identification results for a gyroscope working in both AM and LFM mode are similar, which indicates the effectiveness of the proposed identification method. Instead of using traditional amplitude control loop by adjusting the driving force, we do the automatic gain control by adjusting the parametric pump voltage so that a fixed drive voltage can be used, which also indicates fixed force coupling. Experimental results show that after suppression, the bias instability (BI) of AM mode is improved from 4.7 degrees h(-1) to 2.3 degrees h(-1) and the BI of LFM mode is improved from 1.4 degrees h(-1) to 0.9 degrees h(-1) which is the lowest result reported for LFM gyroscope.
Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

Hong-wu CHEN,Xi-hao CHEN,Chen PENG,Song-qi HU,Jian-xing LENG

DOI: https://doi.org/10.3969/j.issn.1002-1841.2014.12.001

2014-01-01

Abstract:For the trends of vibratory gyroscope's high-performance and miniaturization,a fully symmetric vibratory gyroscope was developed.According to the working principle,using the way of piezoelectric driving and detecting,the total structure design of this gyroscope was established.The number of piezoelectric patches,the structural parameters of the spoke,and the central post had effect on inherent frequency of vibratory gyroscope,and the effect was analyzed by FEM simulation.Then optimized structural pa-rameters ( spoke size:9 mm ×2 mm ×0.5 mm;central post size:4 mm ×4 mm ×10 mm) were obtained.The prototype was fabrica-ted and tested.The results show that structural parameter has vital effect on inherent frequency.The inherent frequency regularly changes with the number of piezoelectric patches,the length,width and thickness of the spoke,and the height of the central post. And it shows the validity of the working principle and the design.This fully symmetric vibratory has a promising prospect.The re-search provides a basis for structure design and optimization of solid vibratory gyroscope.
A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Haibin Wu,Xudong Zheng,Yaojie Shen,Xuetong Wang,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1109/sensors47087.2021.9639632

2021-01-01

Abstract:The work illustrates a resonant constant-frequency (RCF) driving technique used in a MEMS gyroscope which has linear frequency-tuning triangular capacitors. Differing from that conventional driving technique where the gyroscope excitation frequency is time-varying, the RCF strategy assures that the excitation frequency and resonant frequency are equal and constant in the gyroscope drive mode by means of frequency-tuning feedback. As a result, RCF can eliminate effects of excitation-frequency instability and drift on gyroscope output performance. Combining RCF with real-time automatic mode-matching, the tested gyroscope with sense-mode quality factor of 26.75k has achieved bias instability of 0.09 °/h and angle random walk of 0.0087°/√h.
Analysis and Design of Drive Closed-Loop for Mems Vibratory Gyroscope

Yang Liang,Su Yan,Qiu An-ping,Shi Qin,Zhu Xin-hua,Feng Rui

DOI: https://doi.org/10.4028/www.scientific.net/amr.159.406

2010-01-01

Advanced Materials Research

Abstract:The principle of drive closed-loop for tuning fork comb MEMS vibratory gyroscope is analyzed. The core of the closed-loop is to keep the vibration speed stable by adding driving force offset the damping force. The closed-loop with a single Automatic Gain Control (AGC) loop is chosen to maintain the vibration speed stable, and then the closed-loop with AGC is analyzed to obtain its transfer function. The transfer function simplifies the nonlinear AGC system to a linear system which is easy analyzed its parameters impacting the system. The values of two important parameters of AGC were chosen via simulation. The whole closed-loop system was simulated in SIMULINK. The circuit is built and tested in accordance with the theory of analysis and simulation. Experimental results demonstrate that the stability of the amplitude of vibration speed is 90ppm; and that of the frequency of vibration speed is 114ppm.
Analysis and design of a 3rd order velocity-controlled closed-loop for MEMS vibratory gyroscopes

Huan-ming Wu,Hai-gang Yang,Tao Yin,Ji-wei Jiao

DOI: https://doi.org/10.3390/s130912564

2013-09-18

Abstract:The time-average method currently available is limited to analyzing the specific performance of the automatic gain control-proportional and integral (AGC-PI) based velocity-controlled closed-loop in a micro-electro-mechanical systems (MEMS) vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd order. In this paper, we propose a linearization design approach to overcome this limitation by establishing a 3rd order linear model of the control loop and transferring the analysis to the frequency domain. Order reduction is applied on the built linear model's transfer function by constructing a zero-pole doublet, and therefore mathematical expression of each control loop's performance specification is obtained. Then an optimization methodology is summarized, which reveals that a robust, stable and swift control loop can be achieved by carefully selecting the system parameters following a priority order. Closed-loop drive circuits are designed and implemented using 0.35 μm complementary metal oxide semiconductor (CMOS) process, and experiments carried out on a gyroscope prototype verify the optimization methodology that an optimized stability of the control loop can be achieved by constructing the zero-pole doublet, and disturbance rejection capability (D.R.C) of the control loop can be improved by increasing the integral term.
A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

Wei Ma,Yiyu Lin,Siqi Liu,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1088/1361-6439/aa4fd1

2016-12-20

Journal of Micromechanics and Microengineering

Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Design of rebalance loop for an electrostatically suspended micromachined gyroscope

Feng-tian HAN,Zhong-ze FU

DOI: https://doi.org/10.13695/j.cnki.12-1222/o3.2010.01.005

2010-01-01

Abstract:The rotor of an electrostatically suspended micromachined gyroscope is suspended in a vacuum electrode-cavity by controlled electrostatic force and spinning with ultra-high speed. This new design gyroscope can operate as a dual-axis angular rate sensor. In this paper, we present the design and simulation of a rebalance loop for the gyroscope to be used in strapdown inertial navigation application with large dynamic range and high input angular rate. The dynamics of the gyroscope and the scheme to compensate for the unstable position stiffness inherent in electrostatic suspension are derived. Then the stability analysis based on dual-frequency Bode diagram is presented together with system response simulation in order to evaluate the performance of the rebalance loop. The analyzing and simulation results show that the allowable angular rate up to 768 (°)/s and the scale factor of 6.44 mV/((°)·s~(-1)) can be reached.
Rebalance Loop Design of Micromachined ESG

XIAO Qi-jun,CHEN Wen-yuan,CUI feng,LI Sheng-yong,ZHANG Wei-ping

DOI: https://doi.org/10.3969/j.issn.1005-6734.2007.05.016

2007-01-01

Abstract:A novel electrostatically suspended gyroscope(ESG) based on MEMS technology was presented,which could measure dual-axis angular velocity and tri-axis linear acceleration.It adopts the force balance way to measure the angular velocity inputed by the shell,i.e.,it keeps the rotor at the zero position by close-loop control,and the outputed control voltage can reflect the input angular velocity.The rotor’s torque balance equation was established based on the rotor torque analysis.Two types of rebalance ways were presented for the gyroscope working under ideal condition,that is,the tunning method and decoupling method.Simulation results indicate the superiority of the rebalance loop with decoupling control network.When the shell inputs step angular-velocity,the decoupling control has the advantages of fast response,low overshoot and excellent dynamic performance.At last,the circuit realization scheme was presented which show that the decoupling control can be realized by integral and addition operation circuit.
Dynamical analysis of an improved MEMS ring gyroscope encircled by piezoelectric film

Feng Liang,Dong-Dong Liang,Ying-Jing Qian

DOI: https://doi.org/10.1016/j.ijmecsci.2020.105915

IF: 7.3

2020-12-01

International Journal of Mechanical Sciences

Abstract:<p>Micro-electro-mechanical system (MEMS) gyroscope is an important sort of inertial sensor for measuring the angular velocity of spinning structures, which has been extensively applied in various engineering areas used for guidance, location and motion control. In this paper, an improved design of MEMS vibratory ring gyroscope is proposed, in which a thin layer of piezoelectric film (PZF) is introduced encircling the circumferential surface of the ring, aiming to modify the rigidity of the gyroscope. The ring and the PZF are both driven by direct in conjunction with alternating voltages. The coupled differential equations governing the drive and sense motions are established via the Lagrangian equations. The forced responses to the periodic electrostatic action are obtained and the effects of the drive bias voltage, piezoelectric voltage and spinning speed are discussed. Numerical example demonstrates that the employment of PZF can greatly enhance the gyroscope sensitivity. Parametric vibration of the gyroscope due to periodically varying rigidity induced by the periodic piezoelectric voltage is also investigated. The stability regions of the system are acquired by using the multiple scales method, and the effect of the piezoelectric voltage is analyzed. The results show that the attached PZF can also enhance the gyroscope sensitivity by the generated parametric resonance.</p>

engineering, mechanical,mechanics
Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

y x liu,w l feng,c h he,lingfeng wang,l g dong,q c zhao,z c yang,g z yan

DOI: https://doi.org/10.1109/NEMS.2014.6908790

2014-01-01

Abstract:This paper presents a digital closed loop control method for the sense mode of a mode-matching MEMS vibratory gyroscope. The sense closed loop system reported in our previous work is relatively complex and unreliable due to the existence of notch filter. In this work, a more simple and robust control system is realized with the help of mode-matching control. With a tuning voltage automatically applied on the tuning combs of the gyroscope, a frequency split of less than 0.3 Hz is achieved. Experimental results show that the mode-matched gyroscope achieves a scale factor of 18.5mV/deg/s with a nonlinearity of 0.088% and a bias instability of 2.7deg/h.
An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope

Jian Cui,Z. Y. Guo,Q. C. Zhao,Z. C. Yang,Y. L. Hao,G. Z. Yan

DOI: https://doi.org/10.4028/www.scientific.net/kem.483.43

2011-01-01

Key Engineering Materials

Abstract:This paper proposed an effective approach for extending the bandwidth of MEMS vibratory gyroscope by employing the electrostatic force feedback control. The mathematical model for the bandwidth is established through the dynamic model of the gyroscope, which indicates that the bandwidth of the sensor depends on the difference between the resonant frequencies of the two working modes. The system bandwidth can be enlarged by utilizing electrostatic force rebalance control to null Coriolis force caused by external angular rate which can also improve the performance of the transient response. Simulation results forecast a satisfactory performance of the control system with suggested control method.
A Detailed Analysis of the Dynamic Behavior of a MEMS Vibrating Internal Ring Gyroscope

Waqas Amin Gill,Ian Howard,Ilyas Mazhar,Kristoffer McKee

DOI: https://doi.org/10.3390/mi15091107

IF: 3.4

2024-09-03

Micromachines

Abstract:This paper presents the development of an analytical model of an internal vibrating ring gyroscope in a Microelectromechanical System (MEMS). The internal ring structure consists of eight semicircular beams that are attached to the externally placed anchors. This research work analyzes the vibrating ring gyroscope's in-plane displacement behavior and the resulting elliptical vibrational modes. The elliptical vibrational modes appear as pairs with the same resonance frequency due to the symmetric structure of the design. The analysis commences by conceptualizing the ring as a geometric structure with a circular shape possessing specific dimensions such as thickness, height, and radius. We construct a linear model that characterizes the vibrational dynamics of the internal vibrating ring. The analysis develops a comprehensive mathematical formulation for the radial and tangential displacements in local polar coordinates by considering the inextensional displacement of the ring structure. By utilizing the derived motion equations, we highlight the underlying relationships driving the vibrational characteristics of the MEMS' vibrating ring gyroscope. These dynamic vibrational relationships are essential in enabling the vibrating ring gyroscope's future utilization in accurate navigation and motion sensing technologies.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
The Research and Design of Axial Symmetry Resonant MEMS Gyroscope

C. Wang,W. Zhang,J. Tang,Y. Liu,Y. Xing,F. Cui,W. Liu,Y. Cheng,W. Zhao,S. Li

DOI: https://doi.org/10.1142/9789813232808_0011

2018-01-01

Abstract:MEMS vibratory gyroscope has been widely used in military, automotive, and consumer electronics fields for its small size, low power consumption, high reliability, and impact resistance. Particularly, as one of the main directions of domestic and foreign research in the field of micro-gyroscope, the axial symmetry micro vibration gyroscope has higher quality factor, smaller frequency division and many other excellent characteristics. This paper gives a brief introduction of several typical structures of axial symmetry micro vibration gyroscope, then introduces the simulation and testing experiments of some axial symmetry micro vibration gyroscope we designed.
Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Jian Cui,Xiaozhu Chi,Haitao Ding,Longtao Lin,Zhenchuan Yang,Guizhen Yan

DOI: https://doi.org/10.1088/0960-1317/19/12/125015

2009-01-01

Journal of Micromechanics and Microengineering

Abstract:This paper presents a detailed study on the transient response and stability of the automatic gain control (AGC) with a proportion-integral (PI) controller for a MEMS vibratory gyroscope, which constructs a closed-loop control system to make the gyroscope achieve a constant amplitude vibration at its resonant frequency. The nonlinear mathematical model for the control system is established by applying the averaging and linearization method, which is evaluated through numerical simulations. The stability and convergence characteristics of the whole loop are investigated by using the phase plane method and Routh-Hurwitz criterion. The analysis provides a quantitative methodology for selecting the system parameters to approach stability and an optimal transient response. The negative impact induced by drift of the resonant frequency and Q-factor is also discussed. Simulation results predicted by the model are shown to be in close agreement with the experimental results carried out on a doubly decoupled bulk micromachined gyroscope. By optimizing the control parameters, the measured rising time is less than 100 ms without obvious overshoot. The setting time of the whole loop is less than 200 ms with the relative fluctuation of velocity amplitude within approximately 16 ppm for an hour. The resulting overall performance of the gyroscope is tested under atmospheric pressure. The resonant frequencies and the Q-factor of the drive mode and sense mode are 2.986 kHz, 213 and 3.199 kHz, 233, respectively. The gyroscope achieves a scale factor of 27.6 mV/deg/s with nonlinearity less than 120 ppm in the full-scale range of 800 degrees s(-1). The threshold of sensitivity is measured to be about 0.005 degrees s(-1) with noise equivalent angular rate evaluated to be 0.001 degrees/s/Hz(1/2).
Design and implementation of a fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope for robustness improvement

Feng-Yu Lee,Kai-Chih Liang,Emerson Cheng,Weileun Fang

DOI: https://doi.org/10.1109/TRANSDUCERS.2015.7181134

2015-01-01

Abstract:This study demonstrates the structural design and implementation of a single-axis MEMS vibratory rate gyroscope for the robustness improvement. As in Fig.1, features of this study are: (1) the employment of the fully-decoupled mechanism minimizes the mechanical cross-coupling between the drive-mode and the sense-mode; (2) the tuning fork structure combined with differential sensing architecture increases the resistance against external vibrations; (3) a compact structural design consists of the structurally forced (by rigid lever mechanism) anti-phase sense-mode and the linear-coupled anti-phase drive-mode. Preliminary results show a reduced coupling signal of near 500°/s, and the vibration resistances along different directions are also investigated. Moreover, the angular rate sensitivity is 17.7µV/°/s, which can be further improved using a mode-matched operation.
Design and Simulation of Novel MEMS Resonant Gyroscope

樊尚春,王路达,郭占社

2009-01-01

Abstract:A novel silicon microelectromechanical(MEMS) resonant gyroscope was presented.Its advantages include a quasi-digital FM(frequency modulation) output,high sensitivity,high linearity,self-decoupled,etc.The structure includes proof masses,cantilevers,two-stage amplifying leverage mechanisms,double-ended tuning fork(DETF),driving and sensing combs.Two-stage amplifying leverage mechanisms,outboard masses,frame construction etc are used to improve the performance of the structure.The simulation results show that the sensitivity of the gyroscope is 0.309 Hz/(deg·s-1),and the maximum relative deviation is 9.4×10-8 on the measurement range(±300deg/s).In the driven direction,the amplitude of DETF is 2.96×10-6 times as big as its of the external mass.This shows that it has excellent decoupling capability.

A New Self-Oscillation Loop for MEMS Vibratory Gyroscopes

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

Constant-frequency Oscillation Control for Vibratory Micro-Machined Gyroscopes

Theoretical Analysis and Numerical Simulation of Closed-Loop Self-Oscillation System for MEMS Vibratory Gyroscopes

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Analysis and Design of Drive Closed-Loop for Mems Vibratory Gyroscope

Analysis and design of a 3rd order velocity-controlled closed-loop for MEMS vibratory gyroscopes

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

Design of rebalance loop for an electrostatically suspended micromachined gyroscope

Rebalance Loop Design of Micromachined ESG

Dynamical analysis of an improved MEMS ring gyroscope encircled by piezoelectric film

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope

A Detailed Analysis of the Dynamic Behavior of a MEMS Vibrating Internal Ring Gyroscope

The Research and Design of Axial Symmetry Resonant MEMS Gyroscope

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Design and implementation of a fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope for robustness improvement

Design and Simulation of Novel MEMS Resonant Gyroscope