Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

Theoretical Analysis and Numerical Simulation of Closed-Loop Self-Oscillation System for MEMS Vibratory Gyroscopes

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

Analysis and Design of Drive Closed-Loop for Mems Vibratory Gyroscope

Constant-frequency Oscillation Control for Vibratory Micro-Machined Gyroscopes

A New Self-Oscillation Loop for MEMS Vibratory Gyroscopes

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

Analysis and design of a 3rd order velocity-controlled closed-loop for MEMS vibratory gyroscopes

Design and Test of MEMS Gyroscope Control System Based on LMSD

Modeling and Simulation of Micromachined Gyroscope

The Analysis and Design of Closed-Loop Control System for MEMS Vibratory Gyroscopes

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Digital closed-loop controller design of a micromachined gyroscope based on auto frequency swept

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

Design of Digital Demodulation Circuit for Closed Loop Control of Resonant MEMS Gyroscopes

Digital Closed-Loop Control Based on Adaptive Filter for Drive Mode of a MEMS Gyroscope

Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer

System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation

Closed loop control design for the sense mode of micromachined vibratory gyroscopes

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

Electromechanical Analysis of Microelectromechanical Structures and Dynamic Simulations of Laterally Vibratory Microgyroscope