120 Ppm Quality Factor Thermal Stability from -40 ℃ to +60℃ of a Dual-Axis MEMS Gyroscope Based on Joule Effect Dynamic Control

Jian Cui,Qiancheng Zhao
DOI: https://doi.org/10.1109/mems49605.2023.10052533
2023-01-01
Abstract:This paper presents a novel calibration method to improve the thermal stability of the quality factor of a MEMS gyroscope based on Joule effect dynamic control for the first time to the knowledge of the authors, which adjusts the dissipation energy of a resistive element connected to the mechanical structure with closed loop control by monitoring the driving voltage. The results show that the relative variation of the Q-factor dramatically reduced by more than 30000× down to ~120ppm from -40 ℃ to +60℃ after applying the proposed means to a dual-axis gyroscope, which achieves only 30ppm of driving voltage stability over 100℃ range with 3600× reduction. This technique is promising for enhancing the anti-shock performance and alleviating the bias thermal drift caused by the electrical coupling of the MEMS gyroscopes.
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