Forming-Free HfO x -Based Resistive Memory With Improved Uniformity Achieved by the Thermal Annealing-Induced Self-Doping of Ge
Xiang Ding,Xinwei Yu,Zhangsheng Lan,Jianguo Li,Shiqi Zhou,Choonghyun Lee,Yi Zhao
DOI: https://doi.org/10.1109/ted.2023.3247369
IF: 3.1
2023-03-29
IEEE Transactions on Electron Devices
Abstract:In this work, a forming-free HfOx-based resistive random access memory (RRAM) with improved uniformity is successfully demonstrated without an additional doping process, ionic injection, or special layer deposition. The significantly enhanced performances can be attributed to the self-doping of Ge atoms from the Ge bottom electrode (BE) into the HfO2 layer during the postdeposition annealing (PDA) process. Besides, the RRAM provides a lower reset current and a higher ON/OFF ratio than the reported forming-free RRAM. These excellent properties are beneficial to the application of power-saving RRAM and its circuit operation.
engineering, electrical & electronic,physics, applied