Tetragonal Distortion of InN Thin Films by RBS/Channeling

Ding Zhi-Bo,Wu Wei,Wang Kun,Fa Tao,Yao Shu-De
DOI: https://doi.org/10.1088/0256-307x/26/8/086111
2009-01-01
Chinese Physics Letters
Abstract:Rutherford backscattering and channeling spectrometry (RBS/C) are used to identify the crystalline quality (χ min = 4.87%) of an InN thin film as a function of depth, and make a non-destructive quantitative analysis of the structure, in order to analyze the tetragonal distortion of the InN thin film at the depth determined.
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