Structural Characterization of Homoepitaxial Srtio3 Films Grown by Pulsed Laser Deposition

Q. Y. Lei,G. Z. Liu,X. X. Xi
DOI: https://doi.org/10.1080/10584587.2013.780142
2013-01-01
Integrated Ferroelectrics
Abstract:We report the structural characterization of homoepitaxial (001) SrTiO3 films grown by pulsed laser deposition on single crystal (001) SrTiO3 substrates. X-ray diffraction -2 scan and phi scan were used to study the lattice constants and crystal quality of the SrTiO3 films. Lattice expansion in the c-axis from the bulk SrTiO3 was found in many films, which is related to the off-stoichiometry in the films. We create a contour map for both the lattice expansion and cation composition as functions of laser energy density and oxygen pressure, which shows a broad range of growth conditions to achieve stoichiometry in SrTiO3 films.
What problem does this paper attempt to address?