Abstract:The surface structure of SrTiO3(001) thin films homoepitaxially grown by PLD in step-flow mode was characterized using low temperature STM. It was found that one-dimensional (1D) TiOx-based nanostructures were formed on the thin film surface and their density increased with increasing thin film thickness. Most of the 1D nanostructures disappeared after a post-deposition annealing, indicating that this structure is metastable due to the nonequilibrium growth mode. The resulting surface after annealing exhibited similar features to that of a thinner film, having a domain structure with (2x1) and (1x2) reconstructions, but with fewer oxygen-vacancy-type defects. These results imply that the step-flow growth is likely to produce TiOx-rich surface and Ti deficiencies in the film. By the post-deposition annealing, the rich TiOx would diffuse from the surface into the film to compensate defects associated with Ti vacancies and oxygen vacancies, resulting in the stable surface structure with fewer oxygen vacancies. Thus, STM measurements can provide us with a microscopic picture of surface stoichiometry of thin films originating in the dynamics of the growth process, and can present a new approach for designing functional oxide films.

Epitaxial Growth of Dielectric SrTiO 3 Thin Films by Pulsed Laser Deposition

Sr2tio4 Layered Perovskite Thin Films Grown by Pulsed Laser Deposition

Structural Characterization of Homoepitaxial Srtio3 Films Grown by Pulsed Laser Deposition

Epitaxial and Highly Electrical Conductive La0.5Sr0.5TiO3 Films Grown by Pulsed Laser Deposition in Vacuum

Sequential pulsed laser deposition of homoepitaxial SrTiO$_3$ thin films

Epitaxial Growth of Dielectric CaCu3Ti4O12 Thin Films on (001) LaAlO3 by Pulsed Laser Deposition

Epitaxial Growth and Dielectric Properties of Pb0.4Sr0.6TiO3 Thin Films on (00L)-Oriented Metallic Li0.3Ni0.7O2 Coated MgO Substrates

Homoepitaxial growth of SrTiO$_3$ by Pulsed Laser Deposition: energetic vs thermal growth

Atomically Resolved Surface Structure of SrTiO3(001) Thin Films Grown in Step-Flow Mode by Pulsed Laser Deposition

Epitaxial growth of ferroelectric PbTiO3 thin films by metalorganic chemical vapor deposition

Electrical and Optical Properties of Transparent Conducting P‐type SrTiO3 Thin Films

Epitaxial Growth of TiO2 Thin Films by Pulsed Laser Deposition on GaAs(100) Substrates

Epitaxial Growth of Conductive LaNiO3 Thin Films by Pulsed Laser Ablation

Oxygen Pressure Dependence of Structural and Tunable Properties of PLD-deposited Ba0.5Sr0.5TiO3 Thin Film on LaAlO3-substrate

Structural and electrical properties of SrFe x Ti 1−x O 3 ( x =0.001, 0.005 and 0.01) thin films prepared by pulsed laser depositions

Growth Dependencies of Epitaxial Oxide Thin Films Prepared by Pulsed Laser Deposition

Growth Diagram of La0.7Sr0.3MnO3 Thin Films Using Pulsed Laser Deposition

Growth Engineering of SrNbO3 Perovskite Oxide by Pulsed Laser Deposition and Molecular Beam Epitaxy

Growth, Structure And Dielectric Characteristics Of Ba[(Fe1/2nb1/2)(0.1)Ti-0.9]O-3 Thin Films By Pulsed Laser Deposition

Stoichiometry of Srtio3 Films Grown by Pulsed Laser Deposition

X-Ray Analysis Of Epitaxial Pbtio3 Thin Film Grown On An (001)Srtio3 Substrate By Metal-Organic Chemical Vapour Deposition