High Resolution X-Ray Diffraction Investigation of Epitaxially Grown Srtio3 Thin Films by Laser-Mbe

Zhai Zhang-Yin,Wu Xiao-Shan,Jia Quan-Jie
DOI: https://doi.org/10.1088/1674-1137/33/11/004
IF: 2.944
2009-01-01
Chinese Physics C
Abstract:SrTiO3 thin films are epitaxially grown on DyScO3, LaAlO3 substrates with/without buffer layers of DyScO3 and SrRuO3 using laser-MBE. X-ray diffraction methods, such as high resolution X-ray diffraction, grazing incident X-ray diffraction, and reciprocal space mapping are used to investigate the lattice structure., dislocation density, in-plane lattice strain distribution along film thickness. From the measurement results, the effects of substrate on film lattice quality and microstructure are discussed.
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