Strain Distribution in Epitaxial SrTiO3 Thin Films

Z. Y. Zhai,X. S. Wu,Z. S. Jiang,J. H. Hao,J. Gao,Y. F. Cai,Y. G. Pan
DOI: https://doi.org/10.1063/1.2424282
IF: 4
2006-01-01
Applied Physics Letters
Abstract:The lattice strain distributions of epitaxial SrTiO3 films deposited on LaAlO3 were investigated by in situ x-ray diffraction at the temperature range of 25–300K, grazing incident x-ray diffraction, and high resolution x-ray diffraction. The nearly linear temperature dependence of the out-of-plane lattice constant of SrTiO3 was observed in the measured temperature range. The depth distribution of the lattice strain at room temperature for SrTiO3 films includes the surface layer, strained layer, and interface layer.
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