Strain Relaxation And Dislocation Evolution In Epitaxial Perovskite Oxide Thin Films

Huizhong Zeng,Y. Lin,Chonglin Chen
DOI: https://doi.org/10.1080/10584587.2011.574076
2011-01-01
Integrated Ferroelectrics
Abstract:Strain relaxation behavior of perovskite epitaxial layers such as ferroelectric (Pb,Sr)TiO3 thin films on (110) NdGaO3 substrates, and SrRuO3 thin films on LaAlO3 substrates were investigated using high resolution x-ray diffraction. Lattice distortion, dislocation densities and interfacial strain distribution were systematically studied with samples under different fabrication conditions. Strain relaxation and dislocation evolution are found to be dependent upon the deposition and cooling process. Reciprocal space maps reveal different scenarios of strain relaxation behavior in (Pb,Sr)TiO3 and SrRuO3 thin films.
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