Dislocation Density And Strain Distribution In Srtio3 Film Grown On (110) Dysco3 Substrate

Z. Y. Zhai,X. S. Wu,H. L. Cai,X. M. Lu,J. H. Hao,Ju Gao,W. S. Tan,Q. J. Jia,H. H. Wang,Y. Z. Wang
DOI: https://doi.org/10.1088/0022-3727/42/10/105307
2009-01-01
Abstract:High quality SrTiO3 thin film on (1 1 0) DyScO3 substrate is grown by laser molecular beam epitaxy. The lattice strain resulting from the lattice mismatch between the substrate and the film relaxes gradually with depth. A critical thickness of about 30 nm for sharp strain relaxation is observed. The dislocation density, which forms to relax the lattice strain, is estimated to be about 10(8) cm(-2) according to the high resolution x-ray diffraction. The edge dislocation density is slightly larger than that of the screw ones.
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