Dislocation density and strain distribution in SrTiO<sub>3</sub>film grown on (1 1 0) DyScO<sub>3</sub>substrate

Z Y Zhai,X S Wu,H L Cai,X M Lu,J H Hao,Ju Gao,W S Tan,Q J Jia,H H Wang,Y Z Wang
DOI: https://doi.org/10.1088/0022-3727/42/10/105307
2009-01-01
Abstract:High quality SrTiO3 thin film on (1 1 0) DyScO3 substrate is grown by laser molecular beam epitaxy. The lattice strain resulting from the lattice mismatch between the substrate and the film relaxes gradually with depth. A critical thickness of about 30 nm for sharp strain relaxation is observed. The dislocation density, which forms to relax the lattice strain, is estimated to be about 10(8) cm(-2) according to the high resolution x-ray diffraction. The edge dislocation density is slightly larger than that of the screw ones.
What problem does this paper attempt to address?