Phase-shifting AFM Moire Method

A Asundi,HM Xie,J Yu,ZW Zhong
DOI: https://doi.org/10.1117/12.449366
2001-01-01
Abstract:In this paper, a phase shifting technique for atomic force microscope (AFM) scanning moire method is proposed. The phase shifting is realized in four steps from 0 to 2pi by a piezo-scanner in AFM. The measurement method and experimental techniques are described in detail. For demonstration. this method is applied to determine the phase distribution in AFM moire of a 1200 lines/mm holographic grating used to measure thermal deformation in a QFP electronic package.
What problem does this paper attempt to address?