Experimental study on nanometer moire method

Hui-min XIE,Bing ZHAO,Fu-long DAI,Kishimoto SATOSHI,Wei ZHANG
DOI: https://doi.org/10.3321/j.issn:1002-1582.2000.03.003
2000-01-01
Guangxue Jishu/Optical Technique
Abstract:A new scanning moire method is developed to measure in-plane deformation of mica using an atomic force microscope. Moire pattern is formed by the scanning lines of the CRT in AFM system, and the atomic lattice of the mica or high orientated pyrolytic graphite (HOPG). The principle of measurement and the techniques for grating preparation are described in detail. This new method is used to measure the residual deformation of a mica plate after being irradiated by a Nd-YAG laser, and to determine the residual strain of HOPG under a tensile load. Some interesting results are obtained. The successful results verify the feasibility of this method to measure deformation in the nanometer range using the lattice of material as the model grid.
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