Study on the phase shifting technique for the AFM scanning Moire method

Huimin Xie,Tiefu Liu,Yong Lu,J. Yu,Fulong Dai,Wenjun Zhang
2001-01-01
Guangxue Jishu/Optical Technique
Abstract:A new phase shifting technique for atomic force microscope (AFM) scanning Moiré method is proposed. The phase shifting was realized in four steps from 0 to 2π by a piezo-scanner in AFM. The measurement method and experimental techniques are described. This method is applied to determine the phase distribution in AFM Moiré formed by a 1200 lines/mm holographic grating and deformed grating in a QFP electronic package.
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