Phase-shifting Moiré Method with an Atomic Force Microscope

HM Xie,CG Boay,T Liu,YG Lu,J Yu,A Asundi
DOI: https://doi.org/10.1364/ao.40.006193
IF: 1.9
2001-01-01
Applied Optics
Abstract:Using a phase-shifting technique with an atomic force microscope (AFM), we propose a phase-shifting AFM scanning moire method. The phase shifting is realized in four steps from 0 to 2 pi by a piezoscanner in the AFM. The measurement method and experimental techniques are described in detail. For demonstration this method is applied to determine the phase distribution in the AFM moire of a 1200-line/mm holographic grating used to measure the thermal deformation in a Quad FlatPack electronic package. (C) 2001 Optical Society of America.
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