Abstract:In recent years, the micro- and nanoscale structures and materials are observed and characterized under microscopes with large magnification at the cost of small view field. In this paper, a new phase-shifting inverse geometry moiré method for the full-field reconstruction of micro- and nanoscale planar periodic structures is proposed. The random phase shift techniques are realized under the scanning types of microscopes. A simulation test and a practical verification experiment were performed, which demonstrate this method is feasible. As an application, the method was used to reconstruct the structure of a butterfly wing and a holographic grating. The results verify the reconstruction process is convenient. When being compared with the direct measurement method using point-by-point way, the method is very effective with a large view field. This method can be extended to reconstruct other planar periodic microstructures and to locate the defects in material possessing the regular lattice structure. Furthermore, it can be applied to evaluate the quality of micro- and nanoscale planar periodic structures under various high-power scanning microscopes.

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A study on the digital nano-moiré method and its phase shifting technique

Experiment study on nanometer moire method with scanning tunneling microscope

Study on the phase shifting technique for the AFM scanning Moire method

Phase-shifting Moiré Method with an Atomic Force Microscope

Phase-shifting AFM Moire Method

Application of phase shifting technique for SEM scanning moiré method in MEMS

Phase shifting techniques for SEM scanning moire method

Application of phase shifting technique for SEM scanning moire method im MEMS

Experimental study on nanometer moire method

Optical Fringe Multiplication Technique with TEM Nano-Moiré Method

Afm Scanning Moire Method For Nano-Deformation Measurement

Moiré Fringe Method via Scanning Transmission Electron Microscopy

Phase Shifting Focused Ion Beam Moiré Method

An Experimental Study on Digital Nano-Moire Method

Micro/nano Moiré methods

A New Method for the Reconstruction of Micro- and Nanoscale Planar Periodic Structures

Phase-shifting Laser Scanning Confocal Microscopy Moiré Method and Its Applications

In-plane deformation measurement using the atomic force microscope moiré method

Micro/nano moire methods