Phase shifting techniques for SEM scanning moire method

尚海霞,谢惠民,戴福隆,王习术

DOI: https://doi.org/10.3321/j.issn:1002-1582.2003.01.002

2003-01-01

Guangxue Jishu/Optical Technique

Abstract:A new phase shifting technique for scanning electron microscope(SEM) scanning moire method is proposed. The phase shifting was realized in four steps from 0 to 2π by shifting electron beam controlled by the SEM. In this method, holographic grating is replicated to the testing area of the specimens to generate SEM scanning moire. A scanning electron beam, which carries equally spaced grid, is exposed on the specimen. The electron beam on the specimen with the model grid produces moire fringes of bright and dark lines on the monitor of SEM. The phase shifting technique used in electron moire method provides a new way for disposal of fringes pattern in sub-micro moire method. The principle of electron moire method and phase shifting technique related to electron moire method are explained, and the method is applied to determine the phase distribution in SEM moire formed by a deformed grating with frequency of 1200 lines/mm in an electronic package. The experiment proves the validity of this technique, and shows that the sensitivity of experiments is highly improved after phase shifting technique contrasting to common electron beam moire method.