Application of phase shifting technique for SEM scanning moiré method in MEMS

Haixia Shang,Huimin Xie,Fulong Dai

DOI: https://doi.org/10.1117/12.509793

2003-01-01

Abstract:A new phase shifting SEM scanning moire method is proposed in this paper. The phase shifting technique is realized in four steps from 0 to 2 pi by shifting electron beam in y-axis direction controlled by SEM system. It is successfully applied to measure the virtual strain of a MEMS structure with grating of 5000 lines/mm. The experiments prove the technique can be widely used in meso-deformation measurement, and also show the sensitivity of experiments is highly improved after phase shifting technique. It provides a new way for disposal of fringes pattern in sub-micro moire method.