Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Different Effects of Laser on C60 Adsorbed on the Si (111)7 × 7 and Si (100) 2 × 1 Surfaces

Scanning Tunneling Spectroscopy of Individual C60 Molecules Adsorbed on Si(111)-7×7 Surface

Laser Desorption from and Reconstruction on Si(100) Surfaces Studied by Scanning Tunneling Microscopy

First principles study of the adsorption of C60 on Si(111)

Identifying Molecular Orientation Of Individual C-60 On A Si(111)-(7 X 7) Surface

Identifying Molecular Orientation of Individual C 60 on a Si\(111\)-\(7×7\) Surface

Investigations on the ablation behavior of C/SiC under femtosecond laser

Femtosecond laser modification of silicon carbide substrates and its influence on CMP process

Film Growth And Surface Reactions Of C-60 On Si(100)H(2x1)

Optical limiting effect of SiO2 gel containing C60

Electron-beam Damage of C60 Films on Hydrogen-Passivated Si(100)

Femtosecond Laser-Induced Phase Transformation on Single-Crystal 6H-SiC

Surface structure of 3C‐SiC(111) grown on Si(111) surface by C 60 precursor

Decomposition of C 70 and C 60 under Laser Irradiation Monitored by Raman Spectroscopy

On the diffusion of C60 in the porous silica glass and its optical limiting effect

Comparison of structures and hydrophobicity of femtosecond and nanosecond laser-etched surfaces on silicon

Origin of C$_{60}$ surface reconstruction resolved by atomic force microscopy

High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching

Fabricating physicochemical microstructures with super hydrophilicity on Cf/SiC composites surface via picosecond-laser induced ablation

The ablation behavior and modification mechanism of SiC under different laser energy

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation