Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

What problem does this paper attempt to address?

The paper attempts to address the multiscale evolution mechanism of micro-nano structure arrays to V-shaped grooves formed by femtosecond laser irradiation on single-crystal silicon carbide (4H-SiC) material. Specifically, the researchers focus on the effects of laser polarization and the number of scans on the periodic features and micro-nano structures, as well as the evolution process of these structures under different laser energy densities, scanning speeds, and multiple scans. The paper also explores the application of the self-organization model to explain the experimental results and provides an effective means to understand the interaction between femtosecond lasers and silicon carbide materials. The main research contents include: 1. **Formation mechanism of micro-nano structures**: The study investigates the effects of laser-induced surface instability, incubation effect, Coulomb explosion, melting, and evaporation on the formation of micro-nano structures. 2. **Influence of laser parameters**: The analysis covers the impact of laser energy density, scanning speed, and multiple scans on the evolution of micro-nano structures, especially the changes near or above the laser ablation threshold. 3. **Role of laser polarization**: The research explores the influence of laser polarization on the asymmetry of energy distribution and the direction of the micro-nano structure arrays. 4. **Experimental verification**: Through methods such as line scanning, point scanning, and Raman spectroscopy, the composition and morphology of the micro-nano structures are analyzed to verify the effectiveness of the self-organization model. In summary, this paper aims to deeply understand the multiscale evolution mechanism of micro-nano structures formed by femtosecond lasers on single-crystal silicon carbide materials and to provide a theoretical basis for optimizing the preparation process of micro-nano structures.

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