Simulation of TaO X -RRAM with Ta 2 O 5−X /TaO 2−X stack engineering

Y. D. Zhao,P. Huang,Zhuwen Chen,Changze Liu,Haitong Li,Wenjia Ma,Bin Gao,X. Y. Liu,Jinfeng Kang
DOI: https://doi.org/10.1109/sispad.2015.7292315
2015-01-01
Abstract:An atomistic Monte-Carlo simulator of TaO X -based resistive random access memory (RRAM) with bi-layered Ta 2 O 5−X /TaO 2−X stack is developed by considering generation/recombination (G-R) of oxygen vacancies (V O ) with oxygen ions (O2−), phase transition (P-T) between Ta 2 O 5 and TaO 2 as well as interactions of Ta 2 O 5−X /TaO 2−X stack. The stack induced effects involving changeable Schottky barrier (SB) at the stack interface, the evolutions of O2− and lattice oxygen (LO) in the stack and the self-compliance effect are also included in the simulator. Using the simulation tool, the resistive switching (RS) characteristics of the bi-layered TaO X -based RRAM can be reproduced. The impacts of different stack thicknesses, oxygen contents and capabilities to take redox reactions with O2− of TaO 2−X layer on RS behaviors are simulated. The simulation results can be utilized to achieve controllable switching processes and optimized device performances.
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