Study on microscopic model of resistive switching in amorphous tantalum pentoxide from first-principle calculations

Lin Bao,Yichen Fang,Zongwei Wang,Jian Kang,Yuchao Yang,Jintong Xu,Yimao Cai,Ru Huang
DOI: https://doi.org/10.1109/CSTIC.2018.8369194
2018-01-01
Abstract:As one of the emerging memory device, Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> based RRAM has shown various outstanding features, such as low power consumption, high reliability and excellent scalability. In Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> RRAM, the formation and the migration of oxygen vacancies are crucial to the resistive switching characteristics, reliability and uniformity of the device. In this paper, we used the first-principle simulation to study the properties of oxygen vacancies including forming energy and migration barrier in amorphous tantalum pentoxide. The β-Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> supercell was built and annealing algorithm was used for generating amorphous Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> in Material Studio. The band structure and DOS of both materials were studied by Vienna Ab initio simulation program (VASP). We also calculated the formation energy and migration barrier of oxygen vacancies, and discussed the mechanism of conductive path formation in amorphous Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> . Finally, we proposed a new microscopic model of resistive switching mechanism in amorphous Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> RRAM device.
What problem does this paper attempt to address?