Electrostatic Discharge (ESD) Protection Challenges of Gate-All-Around Nanowire Field-Effect Transistors

W. Liu,J. J. Liou,N. Singh,G. Q. Lo,J. Chung,Y. H. Jeong
DOI: https://doi.org/10.1149/1.3567559
2011-01-01
ECS Transactions
Abstract:Electrostatic discharge (ESD) performance, including trigger voltage, failure current, on-resistance and leakage current, of the gate-all-around silicon nanowire field-effect transistor depends on nanowire diameter, gate length and nanowire numbers. The device with best ESD robustness has medium gate length, small diameter and a large number of nanowires with multi-finger-multi-channel layout.
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