The Impact of RTS on the Vt Variation of 65nm MLC NOR Flash Memory

Yimao Cai,Wook-Hyun Kwon,Bong Yong Lee,Jung In Han,Chan-Kwang Park,Song Yun Heub
DOI: https://doi.org/10.7567/ssdm.2007.p-4-8l
2007-01-01
Abstract:This paper discusses the threshold voltage variation caused by random telegraph signals (RTS) in 65nm multilevel (MLC) nor flash memory. A large Vt shift by RTS (near 0.5V) is observed. At the same time, it is shown that the lower and upper tail bits in the array are more impacted by the RTS, indicating that the channel dopant fluctuation aggravates the RTS amplitude in flash memory. Optimizing the channel doping can alleviate RTS issue; however the RTS amplitudes in some bits are still too large to be acceptable in 65nm MLC flash application.
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