Local Heteroepitaxial Diamond Formed Directly on Silicon-Wafers and Observed by High-Resolution Electron-Microscopy

J YANG,ZD LIN,LX WANG,S JIN,Z ZHANG
DOI: https://doi.org/10.1088/0022-3727/28/6/018
1995-01-01
Journal of Physics D Applied Physics
Abstract:Diamond films were synthesized by the hot-filament chemical vapour deposition (HFCVD) method on Si(100) substrates with surface biasing pre-treatment. Evidence has been obtained from high-resolution cross sectional electron microscopy (HREM) that the diamond films grown on Si wafers showed localized epitaxy. There is an angle of approximately 7.3 degrees between Si(100) and D(100) hetero-epitaxial crystalline planes. The same type of twins (coherent twin boundaries of type, Sigma = 3) exists on and near the interface. It is shown that the pre-treatment of the substrate is a key factor for the localized hetero-epitaxy of diamond films on Si wafers.
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