Nanowire-mask based fabrication of high mobility and low noise graphene nanoribbon short-channel field-effect transistors

guotong xu,jing bai,c m torres,emil b song,jia tang,yaoxin zhou,xiangfeng duan,yaqin zhang,yong huang,k l wang
DOI: https://doi.org/10.1109/DRC.2010.5551935
2010-01-01
Abstract:In this work, we present a GNR fabrication method based on a 9 nanowire-mask, where the edge roughness is determined by the surface roughness of the nanowire (<;1nm)2 . With four-terminal measurement setup, single layer nanoribbon (SLR) devices show μhole~1180cm2/(Vs), Ion/Iοff >7 and low frequency noise figure A~10-6 at 300K. Moreover, short-channel SLR (~250nm) shows conductance quantization at 77K , and confirms that the quasi-ballistic transport properties can be achieved through this method.
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