Design and fabrication of microfluidic channel using dry film photoresist for air sampling application

Sun Jianwen,Liu Zewen,Yang Kun,Lu Yanwu
DOI: https://doi.org/10.1109/ICSICT.2014.7021219
2014-01-01
Abstract:This paper presents a design and microfabrication of microchannels in virtual impactor using multilayer dry film photoresist. 8 layers Riston® RSD200 series dry film photoresist were used in this study to realize microfluidic channel with thickness of 400μm.Virtual impactor with total size of 15×20mm is realized. The lateral feature size of the channel is 100μm. The measurement results show that the channel sidewall angle is 127° invertical, which is good enough for forming the air flow path.
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