Abstract:Abstract Conventional manufacturing techniques to fabricate microfluidic chips, such as soft lithography and hot embossing process, have limitations that include difficulty in preparing multiple-layered structures, cost- and labor-consuming fabrication process, and low productivity. Digital light processing (DLP) technology has recently emerged as a cost-efficient microfabrication approach for the 3D printing of microfluidic chips; however, the fabrication resolution for microchannels is still limited to sub-100 microns at best. Here, we developed an innovative DLP printing strategy for high resolution and scalable microchannel fabrication by dosing- and zoning-controlled vat photopolymerization (DZC-VPP). Specifically, we proposed a modified mathematical model to precisely predict the accumulated UV irradiance for resin photopolymerization, thereby providing guidance for the fabrication of microchannels with enhanced resolution. By fine-tuning the printing parameters, including optical irradiance, exposure time, projection region, and step distance, we can precisely tailor the penetration irradiance stemming from the photopolymerization of the neighboring resin layers, thereby preventing channel blockage due to UV overexposure or compromised bonding stability owing to insufficient resin curing. Remarkably, this strategy can allow the preparation of microchannels with cross-sectional dimensions of 20 μm × 20 μm using a commercial printer with a pixel size of 10 μm × 10 μm; this is significantly higher resolution than previous reports. In addition, this method can enable the scalable and biocompatible fabrication of microfluidic drop-maker units that can be used for cell encapsulation. In general, the current DZC-VPP method can enable major advances in precise and scalable microchannel fabrication and represents a significant step forward for widespread applications of microfluidics-based techniques in biomedical fields.

A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists

Rapid Prototyping of Soft Lithography Masters for Microfluidic Devices Using Dry Film Photoresist in a Non-Cleanroom Setting

Fabrication of SU-8 Photoresist Micro–nanofluidic Chips by Thermal Imprinting and Thermal Bonding

Novel microfabrication approach of embedded SU8™ fluidic networks for cell transport on chips

Fabrication of Enclosed Nanofluidic Channels by UV Cured Imprinting and Optimized Thermal Bonding of SU-8 Photoresist

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

A new low-cost fabrication method of SU-8 micro–nano channels and needle tip in electro-hydrodynamic jet chips

Fabrication of a Three-Layer SU-8 Mould with Inverted T-shaped Cavities Based on a Sacrificial Photoresist Layer Technique

A New Fabrication Process for Uniform SU-8 Thick Photoresist Structures by Simultaneously Removing Edge Bead and Air Bubbles

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

A New Fabrication Method for 3D Multilayer Microstructure

Fabrication of Size Controllable SU-8 Nanochannels Using Nanoimprint Lithography and Low-Pressure Thermal Bonding Methods

A Low-Cost Method of Fabricating Hybrid Micro-Nano Fluidic Chip by Double-Layer PDMS Mold and UV–thermal Nanoimprinting

Channel resolution enhancement through scalability of nano/micro-scale thickness and width of SU-8 polymer based optical channels using UV lithography

Digital light processing 3D printing for microfluidic chips with enhanced resolution via dosing- and zoning-controlled vat photopolymerization

Fabrication of SU-8 Nanofluidic Channels by Reverse Thermal Bonding under Mild Conditions

Regular Nano-Pores Fabricated by UV Cross-Linking Non-softbaked SU-8 Resist in a Solvent Evaporation Controlled Environment

Multi-layer Lithography Using Focal Plane Changing for SU-8 Microstructures

Fabrication of an SU-8 Based Microfluidic Reactor on a PEEK Substrate Sealed by a Flexible Semi-Solid Transfer (FST) Process

Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application

Fabrication of Size-Controllable Nanofluidic Channels Using Angled Physical Vapor Deposition