Temperature Dependence of Ordered GeSi Island Growth on Patterned Si (001) Substrates

Zhenyang Zhong,Peixuan Chen,Zuimin Jiang,Guenther Bauer
DOI: https://doi.org/10.1063/1.2965484
IF: 4
2008-01-01
Applied Physics Letters
Abstract:Statistical information on GeSi islands grown on two-dimensionally pit-patterned Si substrates at different temperatures is presented. Three growth regimes on patterned substrates are identified: (i) kinetically limited growth at low growth temperatures, (ii) ordered island growth in an intermediate temperature range, and (iii) stochastic island growth within pits at high temperatures. A qualitative model based on growth kinetics is proposed to explain these phenomena. It can serve as a guidance to realize optimum growth conditions for ordered islands on patterned substrates.
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