Enhancement Of Endurance For Cuxo Based Rram Cell

M. Yin,P. Zhou,H. B. Lv,T. A. Tang,B. A. Chen,Y. Y. Lin,A. Bao,M. H. Cui
DOI: https://doi.org/10.1109/ICSICT.2008.4734695
2008-01-01
Abstract:For the first time, we report that the copper oxide (CuxO) based Resistive Random Access Memory (RRAM) cell can achieve 104 cycles (i.e. similar to 10x better) as a new record as well as elimination of the initial "forming" than reported in literature. The Copper oxide is integrated in MIM (metal-insulator-metal) structure and is grown by plasma oxidation of Cu substrate, with CuO near upper surface and graded CuxO (i.e. increasingly Cu rich or O-vacancies rich) toward the Cu substrate. A thinner CuO upper layer can eliminate "forming" process and, for in turn, greatly enhance the endurance of resistive switching by eliminating the damage during the "forming" process..
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