Stability Enhancement in Copper-Doped Iron Oxide Resistive Random Access Memory via RF Co-Sputtering

Chia Feng Hsu,Hao-Lin Hsu,Yu-chun Huang,Chih-Chiang Yang,Yan-Kuin Su
DOI: https://doi.org/10.1149/2162-8777/ad3365
IF: 2.2
2024-03-14
ECS Journal of Solid State Science and Technology
Abstract:ITO/Cu-doped Fe2O3/ITO thin film resistive random access memory (RRAM) was prepared using a radio-frequency (RF) sputtering system. X-ray diffraction patterns show that the Cu:Fe2O3 thin film has a rhombohedral structure and does not display secondary or impurity phases for copper. Results revealed that the standard deviation and average voltage of Cu:Fe2O3 thin film are −1.98 and 0.92 V for Vset, respectively, while those for Vreset are 1.31 and 0.39 V, respectively. The resistive switching cycles and data retention test times of the Cu:Fe2O3 thin film device show that the on/off ratio is 39.4 and over 104 s. These results indicated that the Cu-doped Fe2O3 thin film can improve the performance of RRAM.
materials science, multidisciplinary,physics, applied
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