Low Threading Dislocation Density in GaN Films Grown on Patterned Sapphire Substrates
Liang Meng,Wang Guohong,Li Hongjian,Li Zhicong,Yao Ran,Wang Bing,Li Panpan,Li Jing,Yi Xiaoyan,Wang Junxi,Li Jinmin
DOI: https://doi.org/10.1088/1674-4926/33/11/113002
2012-01-01
Journal of Semiconductors
Abstract:The growth process of three-dimensional growth mode(3D) switching to two-dimensional growth mode (2D) is investigated when GaN films are grown on cone-shaped patterned sapphire substrates by metal-organic chemical vapor deposition.The growth condition of the 3D-2D growth process is optimized to reduce the threading dislocation density(TDD).It is found that the condition of the 3D layer is critical.The 3D layer keeps growing under the conditions of lowⅤ/Ⅲratio,low temperature,and high pressure until its thickness is comparable to the height of the cone-shaped patterns.Then the 3D layer surrounds the cone-shaped patterns and has inclined side facets and a top(0001) plane.In the following 2D-growth process,inclined side facets coalesce quickly and the interaction of TDs with the side facets causes the TDs to bend over.As a result,the TDD of GaN films can decrease to 1×108 cm-2,giving full-width at half maximum values of 211 and 219 arcsec for(002) and(102) omega scans, respectively.