Abstract:The MEMS capacitive switch based on fixed-fixed microbeam has garnered significant attention due to their geometric simplicity and broad applicability. The accurate model which describes the multiphysical coupled-field of MEMS capacitive switch should be developed to predict their electromechanical behaviors. The improved macromodel of the fixed-fixed microbeam-based MEMS capacitive switch is presented to investigate the behavior of electrically actuated MEMS capacitive switch in this paper, the macromodel provides an effective and accurate design tool for this class of MEMS devices because of taking account into some effects simultaneously including fringing field effect, midplane stretching effect, residual stress and multiphysical coupled-field effect. The numerical analysis of mechanical characterizations of electrically actuated microbeam-based MEMS capacitive switch are performed by the finite element Newmark method, and the performances of static and dynamic of MEMS capacitive switch are obtained. The numerical results show that, with only a few nodes used in the computation, the FEM-Newmark gives the identical results to other numerical methods, such as the shooting method and experiments. Moreover, the proposed model can offer proper and convenient approach for numerical calculations, and promote design of MEMS devices.

Investigation of Design and Vibration Modes of Low-Voltage Driven RF MEME Capacitive Switch for Millimeter Distributed Phase Shifter

Electromechanical Design of Low-Driven Voltage Capacitive Switches Based on Ka-Bank Distributed MEMS Phase Shifters

Analysis and design of MEMS capacitive switch for microwave distributed phase shifter

The mechanical behavior investigation of MEMS switches for millimeter wave phase shifters

Intermodulation Distortion in MEMS Capacitive Switches under High RF Power

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

Time Response and Dynamic Behavior of Electrostatic Driven RF MEMS Capacitive Switches for Phase Shifter Applications

Actuated Voltage Shift Mechanisms Of Mems Capacitive Switch Based On Distributed Phase Shifter

Time Response Characteristic Investigation of the Capacitive Switches for Distributed MEMS Phase Shifters

Study on low voltage actuated MEMS rf capacitive switches

Research on Electro-mechanical Performance of Switch for MEMS Distributed Phaser Working in X Band

Research on the RF-MEMS switch with low elasticity coefficient in the X-band phase shifter

Analysis of Electromagnetic Interference of a Capacitive RF MEMS Switch During Switching

Capacitive Rf MEMS Switch with Composite Beam

Design and Fabrication of a Low Insertion Loss Capacitive RF MEMS Switch with Novel Micro-Structures for Actuation

Design and fabrication of X-band capacitive MEMS switches

An Analytical Model for High Performance Capacitive RF MEMS Switch Design

Design of A Novel Bulk Micro-Machined Rf Mems Switch

A Novel 3-resonance Capacitive RF MEMS Switch

Failure Modes of Doubly Supported Capacitive Rf Mems Switches

Numerical Simulation and Analysis of Electrically Actuated Microbeam-Based MEMS Capacitive Switch