Electromagnetic simulation on high-frequency solenoid inductors formed by focused-ion-beam stress-introducing technique

Xiao Li,Guo Tan,Ling Xia,XiHu Lai,Wengang Wu
DOI: https://doi.org/10.1109/ICSICT.2006.306191
2007-01-01
Abstract:This paper reports the electromagnetic simulation on solenoid-structure inductors for high frequency applications. The components are achieved by the focused-ion-beam stress-introducing technique. The influence of various structure parameters such as the pitch, diameter, number of turns have been analyzed in detail using the Ansoft HFSS simulator. For the inductor with a diameter of about one hundred microns, a wide operation frequency range as well as a maximum quality factor (Q) of 114 can be obtained. For the inductor with a diameter of several hundred nanometers, a maximum Q of more than 7 at THz is predicted
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