High-Performance 3-D Silicon-Embedded Coupled Solenoid Inductors With Inserted Magnetic Core
Pichao Pan,Changnan Chen,Jiebin Gu,Min Liu,Xinxin Li
DOI: https://doi.org/10.1109/ted.2024.3381920
IF: 3.1
2024-04-27
IEEE Transactions on Electron Devices
Abstract:In order to realize high performance and miniaturized integrated voltage regulators (IVRs), the study of ON-chip passive components, especially coupled inductors is necessary. Silicon-embedded coupled three-dimensional solenoidal inductors with 10-turn and 15-turn interleaved windings are designed and batch fabricated in series using micro-electro-mechanical systems (MEMS) and a novel Zn-Al alloy micro-casting technique (MCT) process. The coupled inductors developed in this study incorporating an embedded -thick ferrite magnetic core, exhibit superior inductance integration densities of 56.7 nH/mm2, and ultrahigh coupling coefficients over 0.96 at lower frequencies of around 10 MHz. Besides, the maximum efficiencies of both 10-turn and 15-turn coupled inductors reach 93.23% and 91%, respectively. These results demonstrate significant performance improvements over the corresponding air-core coupled inductors. In addition, both designs exhibit high current carrying capacity with a measured saturation current over 2.2 A when operating in an inversely coupled mode. The superior performance of proposed coupled inductors is beneficial to the design and application of IVRs.
engineering, electrical & electronic,physics, applied