Abstract:With the rapid development of science and technology, the demands for miniaturization, integration and high frequency of the electromagnetic devices were steadily increased. The integrated inductor is an important passive component for RF devices such as power transformers, amplifiers and oscillators. However, the performance of on-chip integrated inductors was poor when operating in GHz band. It is well known that, the integration of a magnetic material as magnetic core can effectively improve the performance of inductors [1]. The normal magnetic materials have very lower resonance frequencies (fr), which can't meet the demand of the high frequency inductance components. But if the magnetic films have in-plane uniaxial magnetic anisotropy, the fr can be exceeded 1 GHz [2]. According to the theoretical calculation results, when serving as magnetic core in solenoid inductor, the magnetic films need to hold excellent soft magnetic performance even for the thickness of the film larger than 200 nm. For high frequency soft magnetic monolayer films and granular films, the high frequency magnetic performance are degenerated drastically because of strong inner stress and large grain size when the film thickness increases to a few hundreds of nanometers. Based on our previous study, the multilayer technology can help to maintain good high frequency soft magnetic properties even though the film is very thick [3]. Therefore, the [Fe80Ni20-O/SiO2]n multilayer magnetic film was selected as magnetic core to fabricate the on-chip integrated solenoid inductor and improve the performance of the inductor.

Design and Optimization of A Novel Solenoid Microinductor with Magnetic Core Material

On-chip Vertical Tapered Solenoid Inductor with High Self-Resonance Frequency

Design And Optimizations Of Solenoid Magnetic Structure For Inductive Power Transfer In Ev Applications

Modeling, Design and Control of High-Speed Powerful Solenoid Based on Giant Magnetostrictive Material

A Solenoid-Type Inductor Fabricated by MEMS Technique

Simulation and Optimization of High Performance On-Chip Solenoid MEMS Inductor

Design of a Novel High Q On-Chip Non-solenoid MEMS Inductor

Modeling of TSV-based Solenoid Inductors for 3-D Integration

3D MEMS In-Chip Solenoid Inductor with High Inductance Density for Power MEMS Device

The simulation study of high-performance micro-inductors Based on MEMS 3D coils

Design Methodology and Manufacture of a Microinductor

Novel MEMS-based Fabrication Technology of Micro Solenoid-Type Inductor

High-Performance 3-D Silicon-Embedded Coupled Solenoid Inductors With Inserted Magnetic Core

Enhancement of Inductance and Quality Factor in Ghz Range of Solenoid Inductor by Integrating [Fe80ni20-O/sio2](n) Magnetic Multilayer Films

Integrated Solenoid Inductor with [fecosin/sinx]18 Multilayer Magnetic Film for GHz Applications

Design and Simulation of Si-Based MEMS Inductor

On-Chip Solenoid Power Inductors with Nanogranular Magnetic Cores

Ferrite-integrated On-Chip RF Solenoid Inductor

On-chip Coupled Inductors with a Novel Spliced Anisotropic and Isotropic Magnetic Core for Inductance and Coupling Enhancement

On-Chip Coupled Solenoid Inductors for Integrated Power Conversion

Performance Comparison of Permalloy Core and Coreless Solenoidal Microinductors