Ferrite-integrated On-Chip RF Solenoid Inductor

Chen Yang,Tian-Ling Ren,Li-Tian Liu,Yuan
DOI: https://doi.org/10.1109/icsens.2008.4716621
2008-01-01
Abstract:New on-chip RF solenoid inductors with Ni-Zn-Cu ferrite-filled structure are reported. The concave-suspending solenoids are fabricated by a post-CMOS MEMS process, and then a CMOS compatible low-temperature nano-powder-mixed-photoresist filling technique is used to fill ferrites into the inductor cavities. It shows significant improvements in inductance L and quality factor Q up to +60% and +107%, respectively, to multi-GHz.
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