Abstract:With the current explosive growth of communication technologies and a wide variety of applications being found for broadband and high frequency of electronic components, LTCC (Low Temperature Cofired Ceramics and Ferrites) with materials that possess special characteristics have been rapidly developed, due to its greater multifunctionality, higher performances, sub-miniaturization and excellent reliability. As one of the most important passive components, the chip inductor with high inductances used in high frequency has attracted significant interests in 3-D miniaturized systems. This paper focuses on the design and fabrication of a chip inductor based on the ZnTi-substituted hexaferrite BaFe12O19 by LTCC technology to realize the 0805 size of standard packaging for high frequency applications. Testing results show that the value of inductor is 2.45uH and cut-off frequency is 548MHz. And the measured results agree with the simulated data basically, which indicates that the samples can satisfy the need of high frequency inductors. The influences of each factor on the performances of inductor are also analyzed. It is an effective method to resolve the consistency problems between simulation and manufacture.

NiCuZn Ferrite Thin Films for RF Integrated Inductors

On-Chip Integrated Inductors with Ni-Zn-Cu-Fe and Y-Bi-Fe Ferrite Thin-films for RF IC

On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC

Ni-Zn Ferrite Film Coated On-Chip Rf Inductor Fabricated by A Novel Powder-Mixed-Photoresist Coating Technique

A RF Integrated Inductor with CoZrO Ferrite Thin Film

Magnetic film inductors for RF IC

Fully Integrated Ferrite-Based Inductors for Rf Ics

Ni-Zn Ferrite-Powder-Mixed-Photoresist Coated On-Chip RF Inductor

NiCuZn Ferrite Thin Films Grown by a Sol–gel Method and Rapid Thermal Annealing

Magnetic Properties of NiCuZn Ferrite Thin Films Prepared by the Sol-Gel Method

The design and fabrication of LTCC chip inductors for high frequency applications based on barium ferrites

NiZnCu Ferrite Prepared by Sol-Gel Process

Ferrite-Integrated On-Chip Inductors for Rf Ics

RF Integrated Planar Inductor Fabricated on Ferrite Substrates

On-chip soft-ferrite-integrated inductors for RF IC

Low-Temperature Annealing Effect of RF Inductor with ${\Hbox{feni-Sio}}_{2}$ Granular Film

High-frequency Micro-Inductor Fabricated on NiCuZn Ferrite Substrates

Ferrite-integrated On-Chip RF Solenoid Inductor

Ferrite-Partially-Filled On-Chip RF Inductor Fabricated Using Low-Temperature Nano-Powder-Mixed-Photoresist Filling Technique for Standard CMOS

Preparation and electromagnetic properties of NiCuZn ferrites and multilayer chip inductors

Ferromagnetic Rf Inductors And Transformers For Standard Cmos/Bicmos