On-Chip Integrated Inductors with Ni-Zn-Cu-Fe and Y-Bi-Fe Ferrite Thin-films for RF IC

Chen Yang,Feng Liu,Tianling Ren,Litian Liu
DOI: https://doi.org/10.1109/ESSDER.2006.307671
2006-01-01
Abstract:On-chip RF integrated inductors with Ni0.4Zn0.4 Cu0.2Fe2O4 and Y2.8Bi 0.2Fe5O12 ferrite thin-films have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit, with the data of Co7ZrO9 ferrite inductor in prior work. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RFIC
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