Abstract:With the rapid development of science and technology, the demands for miniaturization, integration and high frequency of the electromagnetic devices were steadily increased. The integrated inductor is an important passive component for RF devices such as power transformers, amplifiers and oscillators. However, the performance of on-chip integrated inductors was poor when operating in GHz band. It is well known that, the integration of a magnetic material as magnetic core can effectively improve the performance of inductors [1]. The normal magnetic materials have very lower resonance frequencies (fr), which can't meet the demand of the high frequency inductance components. But if the magnetic films have in-plane uniaxial magnetic anisotropy, the fr can be exceeded 1 GHz [2]. According to the theoretical calculation results, when serving as magnetic core in solenoid inductor, the magnetic films need to hold excellent soft magnetic performance even for the thickness of the film larger than 200 nm. For high frequency soft magnetic monolayer films and granular films, the high frequency magnetic performance are degenerated drastically because of strong inner stress and large grain size when the film thickness increases to a few hundreds of nanometers. Based on our previous study, the multilayer technology can help to maintain good high frequency soft magnetic properties even though the film is very thick [3]. Therefore, the [Fe80Ni20-O/SiO2]n multilayer magnetic film was selected as magnetic core to fabricate the on-chip integrated solenoid inductor and improve the performance of the inductor.

Significantly Enhanced Inductance and Quality Factor of GHz Integrated Magnetic Solenoid Inductors with FeGaB/ ${\rm Al}_{2}{\rm O}_{3}$ Multilayer Films

Power-Efficient Voltage Tunable Rf Integrated Magnetoelectric Inductors with Fegab/Al2o3 Multilayer Films

Integrated Solenoid Inductor with [fecosin/sinx]18 Multilayer Magnetic Film for GHz Applications

Enhancement of Inductance and Quality Factor in Ghz Range of Solenoid Inductor by Integrating [Fe80ni20-O/sio2](n) Magnetic Multilayer Films

On-chip Vertical Tapered Solenoid Inductor with High Self-Resonance Frequency

High Quality Factor Integrated Gigahertz Magnetic Transformers with Fegab/Al2o3 Multilayer Films for Radio Frequency Integrated Circuits Applications

Inductance and Q‐factor of micro‐magnetic inductor are enhanced by FeCoB films with self‐bias

High-frequency Magnetic Properties of [Fe80ni20-O/sio2](n) Multilayer Film Served As Magnetic Core of Solenoid Inductor

Ferrite-integrated On-Chip RF Solenoid Inductor

MEMS-based Fabrication of High-Performance Inductors with Back Hollow Structure and Ferromagnetic Film

GHz-Band Integrated Magnetic Inductors

On-chip soft-ferrite-integrated inductors for RF IC

Design and Optimization of A Novel Solenoid Microinductor with Magnetic Core Material

Small-Resistance And High-Quality-Factor Magnetic Integrated Inductors On Pcb

Simulation and Optimization of High Performance On-Chip Solenoid MEMS Inductor

Design of a Novel High Q On-Chip Non-solenoid MEMS Inductor

Ferromagnetic Rf Inductors And Transformers For Standard Cmos/Bicmos

A RF Integrated Inductor with CoZrO Ferrite Thin Film

On-Chip Solenoid Power Inductors with Nanogranular Magnetic Cores

High-Frequency Magnetic Properties Of Multilayer Films For Applications In Solenoid Inductor

Nanosolenoid inductor for high frequency application