Modeling and Simulation of Spiral Inductors in Wafer Level Packaged RF/Wireless Chips

Xinzhong Duo,Li-Rong Zheng,Hannu Tenhunen
DOI: https://doi.org/10.1023/A:1020334300576
IF: 1.321
2003-01-01
Analog Integrated Circuits and Signal Processing
Abstract:In this paper, embedded rectangular spiral inductors on Wafer-Level Packaged (WLP)RF/wireless chips were studied with 3D (three-dimensional) EM (electromagnetic)simulations. The performance of spiral inductors fabricated with various geometrical and technological parameterswas analyzed. It is shown that Q (the quality factor) and f res (theself-resonance frequency) could be improved by using the thick insulator layer and thick/wide metal line,which are fabricated by WLP technology. The value of Q could be over 60 at 20 GHz for such embeddedcomponents, attesting a significant improvement compared to the conventional on-chip counterparts in CMOS. Throughthis study, optimal structures for such components are identified and guidelines for design and fabrications arederived. Finally, a method to estimate the inductance of rectangle spiral inductors is developed. It is useful todetermine the approximate structure of an inductor quickly before detailed 3D EM simulation, which may cost a longtime.
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