2-D Threshold Voltage Model for Short-Channel MOSFET with Quantum-Mechanical Effects

Li Yan-Ping,Xu Jing-Ping,Chen Wei-Bing,Xu Sheng-Guo,Ji Feng
DOI: https://doi.org/10.7498/aps.55.3670
2005-01-01
Abstract:A threshold condition different from the classical one is proposed for MOSFET with quantum effects, by means of self-consistent numerical solution of the Schrdinger's and Poisson's equations, and thus an accurate 1-D threshold-voltage model is obtained with good agreements between simulated results and measurement data. Based on this 1-D model, an accurate 2-D quantum-modified threshold-voltage model for small-scale MOSFET is developed by solving the quasi-2D Poisson's equation and taking short-channel effects and quantum-mechanical effects into consideration. The model can also be used for simulation of electrical properties and design of structural parameters for deep-submicron MOSFETs with high-k materials as gate dielectric.
What problem does this paper attempt to address?