Density functional model of threshold voltage shifts at High-K/Metal gates
R. Cao,Z. Zhang,Y. Guo,J. Robertson
DOI: https://doi.org/10.1016/j.sse.2024.108949
IF: 1.916
2024-05-04
Solid-State Electronics
Abstract:A density functional analysis of oxide dipole layers used to set the threshold voltages in high-K/metal CMOS gate stacks is given in terms of the band alignments and chemical trends of these component oxide layers. The oxides SrO, La 2 O 3 , HfO 2 and Al 2 O 3 are found to have similar band gaps and form a 'staircase' of band alignments, allowing them to shift the metal electrode Fermi level in both n-type and p-type directions. This analysis supersedes previous largely empirical models based on metal oxide ion densities or electronegativity scales.
physics, condensed matter, applied,engineering, electrical & electronic