Threshold Voltage Model for MOSFETs with High-K Gate Dielectrics

XY Liu,JF Kang,L Sun,RQ Han,YY Wang
DOI: https://doi.org/10.1109/55.998873
IF: 4.8157
2002-01-01
IEEE Electron Device Letters
Abstract:An analytic threshold voltage model, which can account for the short channel effect and the fringing field effect of sub-100 nm high-k gate dielectric MOSFETs, has been developed. The model considers the two-dimensional (2D) effect both in silicon bulk and in gate dielectric layer. The results of the model are consistent with 2D numerical simulation results.
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