Mechanical Properties of Sol-Gel Derived BiScO3–PbTiO3 Thin Films by Nanoindentation

Hai Wen,Xiaohui Wang,Longtu Li

DOI: https://doi.org/10.1063/1.2360782

IF: 2.877

2006-01-01

Journal of Applied Physics

Abstract:The mechanical properties of sol-gel derived BiScO3–PbTiO3 (BSPT) thin films annealed at different temperatures were investigated by nanoindentation. The effects of annealing temperature on the microstructures and mechanical properties were discussed. As the annealing temperature increased from 550to800°C, the (100) orientation degree of the BSPT thin films increased from a Lotgering factor [J. Inorg. Nucl. Chem. 9, 113 (1959)] of 0.47 to 0.67, while the grain size increased from 22to54nm. Due to the grain size effect, hardness for the BSPT thin films dropped from 7.8to6.7GPa. By fitting the experiment results with a Hall-Petch equation, a probable lattice friction stress of 4.69GPa and a Hall-Petch constant of 15.35GPanm1∕2 were obtained for the BSPT thin films. Because of the combined effect of grain size and film orientation, Young’s modulus did not show a clear trend with the annealing temperature. The highest Young’s modulus was 132GPa, appearing in the sample annealed at 550°C.