Study on alkaline and acid-alkaline chemical plating of Cu

Sheng Zhong,Houmin Li,Zhigang Yang,Jing Wang
DOI: https://doi.org/10.3321/j.issn:1002-185x.2006.09.020
2006-01-01
Rare Metal Materials and Engineering
Abstract:In this paper the influence of CuSO4, HCHO and NaOH concentrations on the alkaline chemical plating of Cu is discussed and an applicable plating solution for the fabrication of copper interconnect for ULSI is then derived. The application of acid-alkaline combined chemical plating of Cu to ULSI interconnect is studied. At first the acid chemical plating of Cu is employed to fabricate the copper seed layer on TiN barrier, and then the alkaline chemical plating of Cu is followed to achieve Cu films. Through the study, we find that the morphology and crystallography of the seed layer has an important effect on the as-deposited Cu films.
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