Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

A Molecular Kinetic Model for the Optical Emission Spectroscopy Technique in Inductively Coupled Nitrogen Plasma

The validity of oes line-ratio method to determine the electron temperature in inductively coupled nitrogen plamas

A Novel Method to Determine Electron Density by Optical Emission Spectroscopy in Low-Pressure Nitrogen Plasmas

Optical Emission Spectroscopy in Low-Temperature Plasmas Containing Argon and Nitrogen: Determination of the Electron Temperature and Density by the Line-Ratio Method

Comparative Characterization of High-Density Plasma Reactors Using Emission Spectroscopy from Vuv to Nir

Spectroscopic Measurement of Plasma Gas Temperature of the Atmospheric-Pressure Microwave Induced Nitrogen Plasma Torch

Using Oes to Determine Electron Temperature and Density in Low-Pressure Nitrogen and Argon Plasmas

Determination of Rotational and Vibrational Temperatures of A Nitrogen Helicon Plasma

Determination of Vibrational and Rotational Temperatures in Highly Constricted Nitrogen Plasmas by Fitting the Second Positive System of N-2 Molecules

A Combined Atomic Nitrogen‑oxygen OES Line-Ratios Method to Determine the Low-Energy and High-Energy Electron Temperature in Non-Equilibrium Atmospheric Pressure Air Glide Arc Plasmas

An Alternative Method for Gas Temperature Determination in Nitrogen Plasmas: Fits of the Bands of the First Positive System (B Π3g→A Σ3u+)

Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium

Molecular Nitrogen Vibrational Temperature in an Inductively Coupled Plasma

Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges

A Comparison among Optical Emission Spectroscopic Methods of Determining Electron Temperature in Low Pressure Argon Plasmas

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and A Collisional-Radiative Model

Emission spectrum diagnostics for nitrogen plasmas generated by pulsed microwave discharge

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Combined Vacuum Ultraviolet and Optical Emission Analysis of an Inductively Coupled Plasma

Langmuir Probe Measurement and Theoretical Studies on Inductively Coupled Plasma in Ar-N-2 Discharge