Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and A Collisional-Radiative Model

Zhu Ximing,Pu Yikang
DOI: https://doi.org/10.1088/1009-0630/13/3/02
2011-01-01
Abstract:A Maxwellian electron energy distribution function (EEDF) is often assumed when using the optical emission line-ratio method to determine the electron temperature in low-temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a 'two-temperature structure' from the emission line-ratios of Paschen 2p levels of argon and krypton atoms. For applications of this approach in reactive gas (CF4, O-2, etc) discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail.
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